Overview
Define MEMS and identify their unique scale relative to traditional integrated circuits and macro-scale machinery., Evaluate the dual role of silicon as both a high-performance electrical semiconductor and a robust structural mechanical material, Understand scaling laws to predict how surface forces, electrostatics, and thermal time constants dominate behavior at the micro-scale., Model mechanical primitives such as beams, plates, and anchors while accounting for the effects of silicon crystal orientation and anisotropy., Analyze multiphysics constraints including electrostatic pull-in instability limits and the impact of Joule heating on device stability.
Engineers, senior or grad students. Entrepreneurs and Innovators, designers, manufacturing professionals (with our without a college degree). Overall, Professionals Seeking Career Growth
B.S or graduate students, Mechanical engineering, Manufacturing Engineering, Aerospace Engineering, Electronics Engineering, Physics, Technicians with industry experience.
This course explores the fundamental physical principles of Microelectromechanical Systems (MEMS) and their critical role in bridging the gap between the digital and physical worlds. Divided into five sections, it provides a foundational understanding of micro-scale physics, scaling laws, and the mechanical behavior of structures that enable modern sensing and actuation.
The first section introduces the core definitions and scale of MEMS, distinguishing these integrated systems from traditional integrated circuits by their intentional mechanical motion. Students will explore a historical perspective starting with Feynman’s vision and gain an overview of ubiquitous applications, including inertial sensors, micromirrors, and microfluidics.
The second section establishes the essential semiconductor basics required for MEMS engineering. Rather than focusing on complex circuit design, this module emphasizes the dual role of silicon as both an electrical and structural material. Topics include the physical intuition behind doping, the formation of PN junctions for electrical isolation, and why the MOSFET's capacitive nature makes it the ideal foundation for micro-scale sensing.
The third section dives into the critical "Scaling Laws" that explain why the micro-world behaves so differently from our everyday experience. Students will analyze how geometric scaling causes surface forces, such as electrostatics and friction, to dominate over body forces like gravity and magnetism. This module highlights why electrostatic actuation is the industry workhorse and how small-scale structures achieve high resonant frequencies and rapid thermal response.
The fourth and fifth sections focus on the mechanics and multiphysics of MEMS structures. Students will learn to model micro-beams and plates, accounting for the unique mechanical anisotropy of crystalline silicon. The course concludes with an analysis of electrostatic and thermal actuation, covering the fundamental "pull-in" instability limit and the impact of Joule heating on device reliability and design.
By the end of this course, students will develop a strong physical intuition for the micro-scale, moving beyond standard electrical intuition to master the mechanical and thermal constraints of MEMS. Through conceptual modeling, they will gain the skills to analyze and design the next generation of smart, miniaturized systems.
Pedro Portugal
I am fascinated by how science and engineering can unlock new ways of improving life. What began as a commitment to learning has grown into a journey through industry, research, and teaching with each experience reinforcing my belief that progress happens when knowledge is shared with purpose.
My background spans mechanical engineering and the evolving field of Industry 4.0, where design, systems integration, and intelligent technologies converge to solve real-world challenges. Advanced studies, international certifications, and hands-on projects across manufacturing, mobility, and energy have shaped my perspective and given me tools I now try to pass on to others.
Teaching has become one of the most meaningful parts of my path. Through my courses, I strive to make complex ideas accessible and practical, so learners can apply them directly to their own careers and projects. Seeing students around the world take these tools and turn them into new opportunities is what drives me to keep creating.
For me, education is not just about delivering information, it´s about building bridges between curiosity and capability, between discovery and application. My goal is to help you cross that bridge with confidence, persistence, and a sense of possibility.